• Optical Resolution- 1 µm
• Vibration susceptibility- 1.2 µm (when built onto optical table)
• Reticle (Exposure) Dimensions- 1.04mm by 0.58mm
• Exposure Time- 8 seconds
• Mechanical Step Size- 1.5 µm
• Maximum Wafer Size- 1 cm x 1 cm
• Size- 20 cm x 20 cm x 50 cm
• Developed Resolution- 2 µm
• Tiling Alignment Accuracy- 5 µm
• Overlay Alignment Accuracy- 5 µm
• Mechanical Repeatability- 5 µm

Supporting files